
	S.P.A.M. FP7 Marie Curie Research and Initial Training Network

S.P.A.M. partners

Training: TEP B

Surface / interface metrology

Optical metrology is capable of achieving extremely high accuracies regarding 3D surface contouring, distance measurement, spectroscopy, sub–wavelength structure analysis etc. Basic ingredients to achieve the high accuracies are the adequate use of novel light sources, a detailed analysis of the interaction of light with matter (reflection, refraction, diffraction, scattering) and the implementation of advanced detectors and signal processing methods. TEP B covers a wide variety of optical measurement techniques that are or will be used for the characterization of smooth and patterned surfaces: Ellipsometry, FTIR, Scatterometry, E-M modelling and optical microscopy.

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	Open conference on Surface Analytics and Methods SANAM 2011 Training event Advanced training of TEPC "Surface conditioning and preparation" was held in Berlin, 20-23 June 2010 (for access please log-in first). Basic training proceedings Lectures from basic training events and summer school available (For access log-in first) Web-based training available (For access please log-in first) First time login? How to get your login details.

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